Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

Applied Materials Automatch

Primary Model #: 0010-02113

Additional Model #s: 0010-02113

Description: Automatch, 13.56 MHz

Applied Materials Automatch

Primary Model #: 0010-02372

Additional Model #s: 0010-02372

Description: Automatch, 13.56 MHz, HE

Applied Materials Automatch

Primary Model #: 0010-02747

Additional Model #s: 0010-02747

Description: Automatch, 13.56 MHz, HE

Applied Materials Automatch

Primary Model #: 0010-02849

Additional Model #s: 0010-02849, Side Match

Description: Side Match

Applied Materials Automatch

Primary Model #: 0010-02850

Additional Model #s: 0010-02850, Side Match

Description: Side Match, Without fan and coil, used on Side Ultima standard chamber

Applied Materials Automatch

Primary Model #: 0010-02977

Additional Model #s: 0010-02977

Description: Automatch, 13.56 MHz, HE PVD

Applied Materials Automatch

Primary Model #: 0010-04138

Additional Model #s: 0010-04138

Description: Automatch, 13.56 MHz, P5000

Applied Materials ESC

Primary Model #: 0010-04926

Additional Model #s: 0010-04926

Description: HV Module, ESC

Applied Materials Automatch

Primary Model #: 0010-07437

Additional Model #s: 0010-07437, Side Match

Description: Side Match, HDP

AMAT ESC

Primary Model #: 0010-08762

Additional Model #s:

Description: ESC Power Supply (High Voltage Module)

AMAT ESC

Primary Model #: 0010-08762

Additional Model #s:

Description: ESC Power Supply (High Voltage Module)

 

Facebook Twitter LinkedIn Google+