Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

Axcelis DC Power Supply

Primary Model #: 1214130

Additional Model #s: RE600-1.6-04

Description: DC Power Supply, Axcelis

Hüttinger RF Generator

Primary Model #: 1285001

Additional Model #s: SCALO 30, SCALO30

Description:

AIXCON Microwave

Primary Model #: 1700.2021

Additional Model #s: Y2000

Description: Microwave

Axcelis RF Generator

Primary Model #: 190000550

Additional Model #s: 3155089-005, RFG-3001

Description: RF Generator, 13.56 MHz, AE 3155089-005, RFG-3001

Comet Automatch

Primary Model #: 20031426

Additional Model #s:

Description:

Comet Automatch

Primary Model #: 20033325

Additional Model #s: 0190-38451

Description: Automatch, 13.56 MHz, 5 KW, PVD Source

Comet Automatch

Primary Model #: 20034090

Additional Model #s: 0190-37117

Description: Automatch, PVD High Power

Comet Automatch

Primary Model #: 20034274

Additional Model #s: 0190-38622

Description: Automatch, DSM CCP

Comet Automatch

Primary Model #: 20045281

Additional Model #s: 0090-06277, 0190-06277

Description: Automatch, PVD Matrix w/Adpt

Comet Automatch

Primary Model #: 20047804

Additional Model #s: 0190-38261

Description: Automatch, PVD Focus RP

Comet Automatch

Primary Model #: 20047804

Additional Model #s: 0190-38261

Description: Automatch, PVD Focus RP

 

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