Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

Advanced Energy RF Generator

Primary Model #: 3155051-115

Additional Model #s: RFG-5500

Description: RF Generator, 13.56 KW, 5.5 KW, W/SETPOINT TRACK F47 NOVELLUS

Advanced Energy RF Generator

Primary Model #: 3155051-120

Additional Model #s: RFG-5500, 27-115617-00

Description: RF Generator, 13.56 KW, 5.5 KW

Advanced Energy RF Generator

Primary Model #: 3155053-001

Additional Model #s: RFG-2000-2V

Description: RF Generator, 13.56 MHz, 2 KW

Advanced Energy RF Generator

Primary Model #: 3155053-003

Additional Model #s: RFG-2000-2V

Description: RF Generator, 13.56 MHz, 2 KW

Advanced Energy RF Generator

Primary Model #: 3155053-007

Additional Model #s: RFG-2000-2V, 0920-00102, 0920-01031

Description: RF Generator, 13.56 MHz, 2 KW

Advanced Energy Automatch

Primary Model #: 3155054-003

Additional Model #s: MFA

Description: MFA, Fixed Match

Advanced Energy RF Generator

Primary Model #: 3155059-000

Additional Model #s: RFDS-1250

Description: RF Generator, 13.56 MHz, 1250 W, RFDS

Advanced Energy RF Generator

Primary Model #: 3155059-001

Additional Model #s: RFDS-1250

Description: RF Generator, 13.56 MHz, 1250 W, RFDS

Advanced Energy RF Generator

Primary Model #: 3155059-002

Additional Model #s: RFDS-1250

Description: RF Generator, 13.56 MHz, 1250 W, RFDS

Advanced Energy RF Generator

Primary Model #: 3155059-026

Additional Model #s: RFDS-1250, 660-024637-026

Description: RF Generator, 13.56 MHz, 1250 W, RFDS

Advanced Energy RF Generator

Primary Model #: 3155059-026

Additional Model #s: RFDS-1250, 660-024637-026

Description: RF Generator, 13.56 MHz, 1250 W, RFDS

 

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