Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

ASTeX AX2115

Microwave

ASTeX AX3030

Microwave

ASTeX AX3060

Microwave

ASTeX AX3120

Microwave

ASTeX AX7651

Remote Plasma Source

MKS AX7651

Remote Plasma Source

MKS AX7670-06

Remote Plasma Source

ASTeX AX7670-16

Remote Plasma Source

MKS AX7670-16

Remote Plasma Source

MKS AX7670-18

Remote Plasma Source

ASTeX Microwave

Primary Model #: AX2115

Additional Model #s: FI20021

Description: Remote Power Head

ASTeX Microwave

Primary Model #: AX3030

Additional Model #s: FI20023

Description: Dummy Load

ASTeX Microwave

Primary Model #: AX3060

Additional Model #s: FI30615

Description: Phase/Mag Detector

ASTeX Microwave

Primary Model #: AX3120

Additional Model #s: FI20022

Description: 3 Port Circulator

ASTeX Remote Plasma Source

Primary Model #: AX7651

Additional Model #s: FI20620-1, 0920-00013

Description: Remote Plasma Source, MKS ASTRON

MKS Remote Plasma Source

Primary Model #: AX7651

Additional Model #s: FI20620-1, 0920-00013

Description: Remote Plasma Source

MKS Remote Plasma Source

Primary Model #: AX7670-06

Additional Model #s: 0920-00100

Description: Remote Plasma Source

ASTeX Remote Plasma Source

Primary Model #: AX7670-16

Additional Model #s: AX7670-16, AX7670

Description: Remote Plasma Source, MKS ASTRON

MKS Remote Plasma Source

Primary Model #: AX7670-16

Additional Model #s: AX7670-16, AX7670

Description: Remote Plasma Source

MKS Remote Plasma Source

Primary Model #: AX7670-18

Additional Model #s: AX7670-18, AX7670

Description: Remote Plasma Source

MKS Remote Plasma Source

Primary Model #: AX7670-18

Additional Model #s: AX7670-18, AX7670

Description: Remote Plasma Source

 

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