Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

MKS AX7670-19

Remote Plasma Source

ASTeX AX7670-6

Remote Plasma Source

ASTeX AX7685

Remote Plasma Source

MKS AX7685

Remote Plasma Source

ASTeX C12932

Microwave

AGL C12932

Microwave

AGL C12935

Microwave

MKS Remote Plasma Source

Primary Model #: AX7670-19

Additional Model #s: 0190-26744

Description: Remote Plasma Source

ASTeX Remote Plasma Source

Primary Model #: AX7670-6

Additional Model #s: 0920-00100

Description: Remote Plasma Source, MKS ASTRON

ASTeX Remote Plasma Source

Primary Model #: AX7685

Additional Model #s: 0920-00131

Description: Remote Plasma Source, MKS ASTRON

MKS Remote Plasma Source

Primary Model #: AX7685

Additional Model #s: 0920-00131

Description: Remote Plasma Source

Advanced Energy Automatch

Primary Model #: AZX-63

Additional Model #s: AZX

Description: Automatch, 13.56Mhz

Advanced Energy Automatch

Primary Model #: AZX-72

Additional Model #s: AZX

Description: Automatch, 13.56Mhz

Advanced Energy Automatch

Primary Model #: AZX-90

Additional Model #s: AZX

Description: Automatch, 13.56Mhz

ASTeX Microwave

Primary Model #: C12932

Additional Model #s: 61-0052, 911496, GL-139

Description: Microwave Power Supply, 2.45Ghz

AGL Microwave

Primary Model #: C12932

Additional Model #s: Gl-139, 911496, 61-0052

Description: Microwave Power Supply, 2.45Ghz

AGL Microwave

Primary Model #: C12935

Additional Model #s: 94-1104, 911566

Description: Microwave Generator, 2.45Ghz, 1,200 W

AGL Microwave

Primary Model #: C12935

Additional Model #s: 94-1104, 911566

Description: Microwave Generator, 2.45Ghz, 1,200 W

 

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