Equipment Service

Our list of equipment under service.

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ASTeX AX7670-16

Remote Plasma Source

MKS AX7670-16

Remote Plasma Source

MKS AX7670-18

Remote Plasma Source

ASTeX AX7670-19

Remote Plasma Source

MKS AX7670-19

Remote Plasma Source

ASTeX AX7670-6

Remote Plasma Source

ASTeX AX7685

Remote Plasma Source

MKS AX7685

Remote Plasma Source

ASTeX Remote Plasma Source

Primary Model #: AX7670-16

Additional Model #s: AX7670-16, AX7670

Description: Remote Plasma Source, MKS ASTRON

MKS Remote Plasma Source

Primary Model #: AX7670-16

Additional Model #s: AX7670-16, AX7670

Description: Remote Plasma Source

MKS Remote Plasma Source

Primary Model #: AX7670-18

Additional Model #s: AX7670-18, AX7670

Description: Remote Plasma Source

ASTeX Remote Plasma Source

Primary Model #: AX7670-19

Additional Model #s: 0190-26744

Description: Remote Plasma Source, MKS ASTRON

MKS Remote Plasma Source

Primary Model #: AX7670-19

Additional Model #s: 0190-26744

Description: Remote Plasma Source

ASTeX Remote Plasma Source

Primary Model #: AX7670-6

Additional Model #s: 0920-00100

Description: Remote Plasma Source, MKS ASTRON

ASTeX Remote Plasma Source

Primary Model #: AX7685

Additional Model #s: 0920-00131

Description: Remote Plasma Source, MKS ASTRON

MKS Remote Plasma Source

Primary Model #: AX7685

Additional Model #s: 0920-00131

Description: Remote Plasma Source

Advanced Energy Automatch

Primary Model #: AZX-63

Additional Model #s: AZX

Description: Automatch, 13.56Mhz

Advanced Energy Automatch

Primary Model #: AZX-72

Additional Model #s: AZX

Description: Automatch, 13.56Mhz

Advanced Energy Automatch

Primary Model #: AZX-72

Additional Model #s: AZX

Description: Automatch, 13.56Mhz

 

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