Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

MKS AX7670-19

Remote Plasma Source

ASTeX AX7670-6

Remote Plasma Source

ASTeX AX7685

Remote Plasma Source

MKS AX7685

Remote Plasma Source

ENI B-10513

RF Generator

ENI B-3013

RF Generator

ENI B-5002

RF Generator

MKS Remote Plasma Source

Primary Model #: AX7670-19

Additional Model #s: 0190-26744

Description: Remote Plasma Source

ASTeX Remote Plasma Source

Primary Model #: AX7670-6

Additional Model #s: 0920-00100

Description: Remote Plasma Source, MKS ASTRON

ASTeX Remote Plasma Source

Primary Model #: AX7685

Additional Model #s: 0920-00131

Description: Remote Plasma Source, MKS ASTRON

MKS Remote Plasma Source

Primary Model #: AX7685

Additional Model #s: 0920-00131

Description: Remote Plasma Source

Advanced Energy Automatch

Primary Model #: AZX-63

Additional Model #s: AZX

Description: Automatch, 13.56Mhz

Advanced Energy Automatch

Primary Model #: AZX-72

Additional Model #s: AZX

Description: Automatch, 13.56Mhz

Advanced Energy Automatch

Primary Model #: AZX-90

Additional Model #s: AZX

Description: Automatch, 13.56Mhz

ENI RF Generator

Primary Model #: B-10513

Additional Model #s: 10513

Description: Spectrum

ENI RF Generator

Primary Model #: B-3013

Additional Model #s: 3013

Description: Spectrum

ENI RF Generator

Primary Model #: B-5002

Additional Model #s: Spectrum, 5002, B-5002-02

Description: Spectrum

ENI RF Generator

Primary Model #: B-5002

Additional Model #s: Spectrum, 5002, B-5002-02

Description: Spectrum

 

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