Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

ADTEC AX-3000 III

RF Generator

ASTeX AX2115

Microwave

ASTeX AX3030

Microwave

ASTeX AX3060

Microwave

ASTeX AX3120

Microwave

ASTeX AX7651

Remote Plasma Source

MKS AX7651

Remote Plasma Source

MKS AX7670-06

Remote Plasma Source

ASTeX AX7670-16

Remote Plasma Source

MKS AX7670-16

Remote Plasma Source

ADTEC RF Generator

Primary Model #: AX-3000 III

Additional Model #s: AX-3000

Description:

ASTeX Microwave

Primary Model #: AX2115

Additional Model #s: FI20021

Description: Remote Power Head

ASTeX Microwave

Primary Model #: AX3030

Additional Model #s: FI20023

Description: Dummy Load

ASTeX Microwave

Primary Model #: AX3060

Additional Model #s: FI30615

Description: Phase/Mag Detector

ASTeX Microwave

Primary Model #: AX3120

Additional Model #s: FI20022

Description: 3 Port Circulator

ASTeX Remote Plasma Source

Primary Model #: AX7651

Additional Model #s: FI20620-1, 0920-00013

Description: Remote Plasma Source, MKS ASTRON

MKS Remote Plasma Source

Primary Model #: AX7651

Additional Model #s: FI20620-1, 0920-00013

Description: Remote Plasma Source

MKS Remote Plasma Source

Primary Model #: AX7670-06

Additional Model #s: 0920-00100

Description: Remote Plasma Source

ASTeX Remote Plasma Source

Primary Model #: AX7670-16

Additional Model #s: AX7670-16, AX7670

Description: Remote Plasma Source, MKS ASTRON

MKS Remote Plasma Source

Primary Model #: AX7670-16

Additional Model #s: AX7670-16, AX7670

Description: Remote Plasma Source

MKS Remote Plasma Source

Primary Model #: AX7670-16

Additional Model #s: AX7670-16, AX7670

Description: Remote Plasma Source

 

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