Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

ASTeX Microwave

Primary Model #: FI20023

Additional Model #s: AX3030

Description: Dummy Load

ASTeX Microwave

Primary Model #: FI20045

Additional Model #s: 3785-01106

Description: Smart Match

ASTeX Microwave

Primary Model #: FI20047

Additional Model #s: FI20047

Description: Microwave Head

ASTeX Microwave

Primary Model #: FI20049

Additional Model #s:

Description:

ASTeX Microwave

Primary Model #: FI20162-3

Additional Model #s: 687-013518-002

Description: Microwave Head, Smart Power

ASTeX Microwave

Primary Model #: FI20606

Additional Model #s: Smart Match

Description: Smart Match

MKS Microwave (Waveguide)

Primary Model #: FI20607

Additional Model #s:

Description:

ASTeX Remote Plasma Source

Primary Model #: FI20620

Additional Model #s: 0920-00013, AX7651-2

Description: Remote Plasma Source, MKS ASTRON

ASTeX Smart Match

Primary Model #: FI30614

Additional Model #s: FI30614

Description: Smart Match

ASTeX Microwave

Primary Model #: FI30615

Additional Model #s: AX 3060, AX-3060

Description: Phase Mag Detector

ASTeX Microwave

Primary Model #: FI30615

Additional Model #s: AX 3060, AX-3060

Description: Phase Mag Detector

 

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