Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

MKS FI20607

Microwave (Waveguide)

ASTeX FI20620

Remote Plasma Source

ASTeX FI30614

Smart Match

ASTeX FI30615

Microwave

Deltron FM12C6-04-CG

DC Power Supply

Comdel FP7117R1

RF Generator

Deltron FT46AHH33-36P

DC Power Supply

AIXCON GA8213

Microwave

ENI GEW-2527

RF Generator

MKS Microwave (Waveguide)

Primary Model #: FI20607

Additional Model #s:

Description:

ASTeX Remote Plasma Source

Primary Model #: FI20620

Additional Model #s: 0920-00013, AX7651-2

Description: Remote Plasma Source, MKS ASTRON

ASTeX Smart Match

Primary Model #: FI30614

Additional Model #s: FI30614

Description: Smart Match

ASTeX Microwave

Primary Model #: FI30615

Additional Model #s: AX 3060, AX-3060

Description: Phase Mag Detector

Deltron DC Power Supply

Primary Model #: FM12C6-04-CG

Additional Model #s: FM12C6-04

Description: DC Power Supply

Comdel RF Generator

Primary Model #: FP7117R1

Additional Model #s: CB600, CB-600

Description: RF Generator, 600 W

Deltron DC Power Supply

Primary Model #: FT46AHH33-36P

Additional Model #s: FT46AHH33

Description: DC Power Supply

Varian RF Generator

Primary Model #: G19-10074-00

Additional Model #s: G19-10074

Description: RF Generator, Low Frequency

AIXCON Microwave

Primary Model #: GA8213

Additional Model #s: GA8213

Description: Microwave

ENI RF Generator

Primary Model #: GEW-2527

Additional Model #s: GEW2527

Description: RF Generator, 27.1Mhz, 2,500 W

ENI RF Generator

Primary Model #: GEW-2527

Additional Model #s: GEW2527

Description: RF Generator, 27.1Mhz, 2,500 W

 

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