Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

LAM RF Set

Primary Model #: OB1

Additional Model #s: OB1

Description: RF Set

MKS One Box

Primary Model #: OB1-01

Additional Model #s: OB1, 660-099877-002, 660-099877R002, 660-099877-R002, One-Box, One Box

Description: One Box

ENI One Box

Primary Model #: OB1-01

Additional Model #s: 660-099877-002, 660-099877R002, 660-099877-R002

Description:

ENI One Box

Primary Model #: OB1-02

Additional Model #s: OB1-02, 660-099877-004, 660-099877R004,660-099877-005, 660-099877R005, 660-099877-006, 660-099877R006

Description: One Box

LAM RF Set

Primary Model #: OB1-02

Additional Model #s: OB1-02, 660-099877-004

Description: RF Set

MKS One Box

Primary Model #: OB1-02

Additional Model #s: OB1, 660-099877-004, 660-099877-005, 660-099877-006, 660-099877R004, 660-099877-R004, 660-099877R005660-099877-R005, 660-099877R006, 660-099877-R006

Description: RF Set

LAM RF Set

Primary Model #: OB1-03

Additional Model #s: OB1-03

Description: RF Set

MKS One Box

Primary Model #: OB1-03

Additional Model #s: OB1, 660-099877-101, 660-099877R101, 660-099877-R101, 000-1134-101, 000-1134-101R, 660-099877-201, 660-099877R201

Description: RF Set

ENI One Box

Primary Model #: OB1-03

Additional Model #s: OB1-03, 660-099877-101, 660-099877R101

Description: One Box

ENI RF Generator

Primary Model #: OEM-10

Additional Model #s: OEM-10

Description: RF Generator, 13.56 MHz

ENI RF Generator

Primary Model #: OEM-10

Additional Model #s: OEM-10

Description: RF Generator, 13.56 MHz

 

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